Product

Name: mechatronic Wafer Loader mWL300 
Description: The Wafer Loader mWL 300 is designed for fully automated loading and unloading of 300 mm (12”) standard wafers and e.g. eWLB wafers from FOUPs/FOSBs onto a customized external chuck. 
Details

Name: mechatronic Wafer Loader mWL 200 
Description: The Wafer Loader mWL 200 is designed for fully automated loading and unloading of 200mm (8”) standard wafers and e.g. eWLB wafers from cassettes onto a customized external chuck. 
Details

Name: mechatronic Wafer Loader mWL 150/200t 
Description: The Wafer Loader mWL 150/200t is designed for fully automated loading and unloading of 150/200 mm (6”/8”) thinwafers from cassettes onto a customized external chuck. 
Details

Name: mechatronic Packing Tool mPT 300 
Description: The Packing Tool mPT 300 is designed for packing and unpacking of 300 mm (12”) thin-wafers by using a contactless endeffector. The mPT 300 offers an outstanding “throughput/footprint ratio” of up to 160wafer/m². 
Details

Name: mechatronic Ring Remover mRR 200 
Description: The Ring Remover mRR 200 enables fully automated removal of rings from laminated 200 mm (8") wafers on film frames. 
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Name: mechatronic Wafer Sorter mWS 150/200 
Description: The Wafer Sorter mWS 150/200 is designed for sorting 150/200 mm (6”/8”) wafers and can be equipped with up to six cassettes. The mWS 150/200 continuously monitors all wafers and verifies the conformity of wafer and end-effector size. 
Details