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二零一五年台灣平坦化論壇


 

 

 

日期:20159月4日 星期五

時間:08:15-12:10 (08:15 - 08:35 為報到時間) 

地點:台北南港展覽館1館 402c 會議室


主題: 正本清源  鞏固中道

 

論壇簡介

延續摩爾定律也罷,超越也罷,基板的選擇,液態研磨材的監控,確保前段與後段間無缺陷連接,將是CMP嚴苛而無法迴避之挑戰。

 

主辦單位

 

 

協辦單位                 

 

 

執行單位

 

 


 

 

Tentative Agenda


Time

 

Topics / Speakers


08:15-08:35

 

Registration, sign up


08:35-08:40

 

Opening Remarks: Dr. CS Chern, Director of MTC, TSMC,

Chairman of Board Directors of CMPUGTW

 

 

0840‒1020 Session I

Moderator: Dr. LC Kong, Board Supervisor of Innoever Corporation

 

08:40-09:10

 

1)Nanoparticle Metrology in Semiconductor Manufacturing

Dr. Wei-En Fu, Manager, Center for Measurement Standards, Industrial Technology Research Institute

 

09:10-09:40

 

 

2) Manufacturing of CVD Diamond Wafer

Dr. Thomas Jeng, Sr. Staff, Fongso Technology Corporation
09:40-10:05

 

 

5) TSV CMP Slurry Market and Technology Trend

Dr. Kai Luo, Sr. Product Manager, Anji Microelectronics

10:05-10:20

 

 

4) Overview of CMP Innovation Center at Taiwan Tech

Professor Chao Chung Chen, Distinguished Professor, Director of CMP Innovation Center, Taiwan Tech

10:20-10:40

 

Break


 

1040‒1210 Session II

Moderator: Dr. Charles Lin, Director, Dow Chemical Electronic Materials

 

10:40-11:10

 

5) Alternative Planarization Technology using Gas Cluster Ion Beam (GCIB) for Advanced Logic Technology

Dr. Yongsik Moon, Principal Member of Technical Staff, Advanced Technology Development, Globalfoundries
11:10-11:40

 

 

6) Micro-replicated Pad Conditioner for Advance Technology Node

Waldo Wang, Technical Service Specialist, 3M


11:40-12:10

 

7) New Innovation Method for FinFET CMP Process Monitor

Ravi Sanapala, Product Applications Manager/KLA-Tencor

 

12:10


 

Adjournment

■ 主辦單位保留議程更改之權利。

 

 

 

 

論壇費用


 

 

By 8/23

 

8/24 - 8/319/4 Walk-in

 

CMPUGTW board staffs, committees


Free

Free

TWD 200

 

CMPUGTW regular members


TWD 600TWD 1000TWD 1200

Non-members

TWD 1000TWD 1200

 

TWD 1500


 

On-line registration: Now till 9/1. After 9/1, only walk-in registration on 9/4.

 

 

■ 以上價格皆未含5%稅。

 

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王竹君小姐                                       
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Email:gwang@semi.org